Overlay Metrology Specialist - eBeam

Job Title

Overlay Metrology Specialist - eBeam

Role Summary

Develop and deliver eBeam-based overlay metrology applications for advanced logic and memory semiconductor processes. The role is based in Hsinchu, Taiwan and works with product engineering, systems, software, algorithms, and field teams to qualify and support production metrology solutions.

Experience Level

Mid-level; the posting requests demonstrated experience operating SEM and optical metrology systems (typically 5+ years of relevant industry experience).

Responsibilities

Key responsibilities include development, qualification, customer support, and collaboration to deploy metrology solutions.

• Develop, optimize, and qualify eBeam metrology applications for overlay, CD, EPE, and process control.
• Design and execute characterization plans to evaluate tool performance, accuracy, precision, matching, and throughput.
• Lead customer demonstrations, evaluations, head-to-head studies, beta testing, and production qualifications.
• Analyze process and metrology data to identify issues, propose solutions, and drive process-control improvements.
• Create measurement recipes, Best Known Methods, technical documentation, and application reports.
• Troubleshoot customer issues and provide technical support for production and development projects.
• Collaborate with cross-functional teams (Product Engineering, Systems, Software, Algorithms, Marketing, Sales) to improve products and develop new applications.
• Provide technical training and application expertise to customers, field engineers, and internal teams.
• Support technology development for advanced logic, DRAM, and NAND processes.

Requirements

Must-have technical skills, experience, and behavioral attributes.

• Expertise in overlay metrology (eBeam, optical metrology, or both).
• Proven experience operating SEM and optical metrology systems in the semiconductor industry (source cites 5+ years for this capability).
• Ability to perform complex data and image analysis using analytical tools.
• Proven project leadership: plan, execute, and report from kickoff to completion.
• Strong communication, organizational, analytical, and interpersonal skills; able to present results to internal and external customers.
• Able to work independently and in cross-functional teams.
• Willingness to travel domestically and internationally up to ~25% on short notice.
• Nice-to-have: experience with Python, MATLAB, JMP, SQL, or similar analytical tools.
• Nice-to-have: familiarity with optical CD, scatterometry, film metrology, and process characterization.

Education Requirements

Minimum qualifications in the posting: Doctorate (academic) degree plus 4 years related work experience; or Master's degree plus 6 years related work experience. No specific fields of study or certifications were specified.

About the Company

Company: KLA

Headquarters: Chennai, India

KLA is a global leader in diversified electronics for the semiconductor manufacturing industry. The company enables the production of electronic devices by inventing systems and solutions for manufacturing integrated circuits, wafers, and displays. With over 40 years of experience, KLA invests heavily in innovation and R&D to support advanced chip design and manufacturing process optimization, collaborating with top technology providers to deliver future electronic devices.