EUV Mask Technology R&D Engineer

Job Title

EUV Mask Technology R&D Engineer

Role Summary

Lead research and development of EUV mask materials, film stacks, and processes to enable High-NA EUV manufacturing. Work with lithography, OPC, design, manufacturing and suppliers to translate lithography requirements into manufacturable, reliable mask technologies.

Hands-on role combining materials/process development, data-driven experimentation, and technology transition into FEOL process teams.

Experience Level

Mid-level. The posting describes a lead R&D role and mentoring responsibilities but does not specify years of experience.

Responsibilities

Primary responsibilities include developing mask materials and processes and ensuring readiness for High-NA EUV manufacturing.

• Lead development of AI-assisted EUV mask blank materials and mask processes (film stack design, deposition, etch, clean, patterning quality).
• Drive High-NA EUV readiness through material selection, mask design, stitching, lithography performance, and lifetime improvements.
• Translate lithography and OPC requirements into manufacturable mask solutions in partnership with design and lithography teams.
• Plan and execute data-driven R&D using DOE and fundamental analysis to improve yield, reliability, and manufacturability.
• Mentor and guide engineers; transition developed technologies to FEOL process engineering teams and suppliers.

Requirements

Must-have technical skills and abilities are listed below; preferred skills follow.

• Hands-on experience with EUV mask technology, thin films, materials, or process characterization.
• Experience with material selection, film stack design, deposition, etch, cleaning, and patterning quality control.
• Data-driven R&D skills: DOE, statistical analysis, and root-cause/problem-solving in semiconductor processes.
• Ability to translate lithography and OPC requirements into practical, manufacturable solutions and communicate across R&D, manufacturing, and suppliers.
• Demonstrated innovation in semiconductor manufacturing and the ability to mentor and transition technology to production teams.

Nice-to-have:

• Experience with High-NA EUV, mask characterization methods, or mask reliability testing.
• Background in mask material analysis, film stack simulation, or mask lifetime improvement.
• Experience collaborating with equipment or blank suppliers on advanced technology development.
• Familiarity with roadmap planning or defining tool/process capability requirements.

Education Requirements

MS or PhD in Materials Science, Physics, Chemistry, Chemical Engineering, or a related field (or equivalent practical experience).

About the Company

Company: Micron Technology

Headquarters: Boise, Idaho, USA

Micron Technology is a global leader in memory and storage solutions, dedicated to transforming how the world uses information. The company offers a diverse portfolio of high-performance DRAM, NAND, and NOR memory products under the Micron and Crucial brands. With a commitment to customer focus and technological innovation, Micron drives advancements in artificial intelligence, 5G, and other data-centric applications, empowering users to learn, communicate, and progress.