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Senior Systems Engineer

Onto Innovation
September 19, 2026
Full-time
On-site
Wilmington, Massachusetts, United States
$115,200 - $172,800 USD yearly
Other Semiconductor Jobs, Level - Senior

Job Title

Senior Systems Engineer

Role Summary

Lead and structure system-level design programs for lithography and related equipment product lines. Develop system models and subsystem requirements to provide clear specifications and verification criteria for hardware and software teams.

Work with product managers, business-unit leaders, and matrixed engineering teams to scope, prioritize, and deliver products from concept through production release.

Experience Level

Senior-level. 5–10 years developing complex electro-mechanical systems with integrated software controls, preferably in semiconductor capital equipment.

Responsibilities

Accountable for system architecture, requirements, verification, and cross-disciplinary delivery.

  • Lead design programs and manage system development from concept to product release.
  • Define system models, subsystem requirements, interface specifications, and test/success criteria.
  • Coordinate hardware, software, and manufacturing teams to produce clear design specifications and integration plans.
  • Develop large modules from complex sub-assemblies and oversee integration and calibration using embedded metrology.
  • Specify precision opto-mechanical components and alignment procedures at micron-scale tolerances.
  • Define controls, timing diagrams, and measurement strategies; identify and resolve latency and performance issues.
  • Manage schedules and technical specifications in partnership with product management and business leadership.

Requirements

Core qualifications and technical skills required.

  • 5–10 years developing complex electro-mechanical systems with sophisticated software controls; experience in semiconductor equipment is preferred.
  • Proven success in system design, integration, and project management to bring products into manufacturing.
  • Experience with electro-mechanical motion-controlled systems and precision mechanisms.
  • Experience with opto-mechanical interfaces and calibration using embedded metrology.
  • Familiarity with stepper, linear, and servo motors, including control basics, thermal effects, and material stress/strain.
  • Experience with controls, timing diagrams, latency identification/isolation/diagnosis, and measurement techniques.
  • Ability to travel internationally at least 20% of the time.

Nice-to-have:

  • Direct lithography or semiconductor fab equipment development experience.
  • Cross-disciplinary familiarity with mechanical, electrical, software, control, optical, or manufacturing engineering.

Education Requirements

MS or higher (Master's or above) in engineering, physics, optics, or a related technical field. The posting specifies an MS or higher degree and lists relevant disciplines including Mechanical Engineering, Electrical Engineering, Software Engineering, Dynamic Systems/Control, Optical Engineering, and Manufacturing Engineering.


About the Company

Company: Onto Innovation

Headquarters: Wilmington, MA, United States

Onto Innovation develops process-control solutions for the semiconductor industry, offering optical inspection, 3D metrology, defect inspection, composition analysis, factory analytics, and lithography technologies to improve yield, performance, and reliability across the semiconductor value chain.

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Date Posted: 2026-09-18